mems technique meaning in English
微机电系统技术
Examples
- Under the background of epw , a high - g accelerometer with mems technique , which can measure from 1000g to 50000g and stand over 50000g impact , is designed
论文以钻地武器为背景，采用mems工艺技术设计一种耐50000g以上的、量程在1000 50000g基于mems工艺的高g值加速度计。 - Abstract : silicon and silicon based mems techniques are the main streams of mems techniques . the microstructure gas sensors manufactured by these techniques are introdued briefly in the paper
文摘:硅和硅基微机电系统技术是微机电系统技术的主流,本文主要介绍用这种技术制造的各种微结构气敏传感器。 - Mems ( micro electromechanical system ) has become one of the most rapidly development technologies . along with the rapid development of mems techniques , capacitive sensor is used widely whose capacitance changes small , which has put forward the new request to the measurement technique . the common measure for capacitance measurement is that convert capacitance to voltage , electric current or frequency . the area of polar plate of the capacitor becomes smaller and smaller , and the total capacitance of micro capacitive sensor is usually several pico farad only . as a result , its change amount is smaller
Mems ( microelectromechanicalsystem )近年来发展最快的技术之一,随着mems技术的快速发展,电容式加速度计的电容变化变化量越来越小,对检测技术提出了新的要求。在电容式传感器中,常用电容检测电路是将其转换为电压、电流或者频率信号。目前的微型电容传感器的极板面积变得越来越小,电容总量只有几个pf ,变化量就更小。 - The acceleration sensor has been developed using mems technique , microelectronic technique , and vacuum electronic technique . it can be widely used in navigation and aerospace , industry automation and car airbag control and so on . the research of such kind of acceleration sensor is of great scientific significance
该传感器集固体器件和真空电子器件的优点于一身:具有抗辐射、温度稳定性好、快响应、高灵敏、高分辨率、低电压、低功耗、信号处理电路简单、体积很小等优点。